Where academic tradition
meets the exciting future

Microsensors (2016Spring)

Organisation: UTU / Dept. of Future Technologies

Credit Points: 5

Responsible Person: Lauri Heikkilä

Course code: ETT_3008

Learning outcomes:
Students will be able to describe and explain integrated semiconductor sensor operation principles and apply those sensors in various applications.

Physical and electric principles of integrated semiconductor sensors. Acoustic, mechanical, magnetic, radiation, thermal, chemical and biological sensors. MEMS structures are included. Interface electronics and measurement techniques for smart sensor systems. During the course students (in groups of 2) have to keep a presentation from a selected sensor.



  1. Wed 10.1.–28.2. weekly at 14–16, 110C, Agora
  2. Thu 18.1.–1.3. weekly at 12–14, K126A&B